• 姓名: 陈金平
  • 性别: 男
  • 职称: 研究员
  • 职务: 
  • 学历: 博士
  • 电话: 010-82543518
  • 传真: 
  • 电子邮件: chenjp@mail.ipc.ac.cn
  • 通讯地址: 北京市中关村东路29号
    简  历:
  • 陈金平,男,2000年7月毕业于山东大学化学学院,获理学学士学位;2000年9月—2005年7月就读于中国科学院理化技术研究所,获理学博士学位,毕业后留所工作,任助理研究员;2007年4—2009年3月,受日本学术振兴会(JSPS)的资助,在日本京都大学大须贺(Atsuhiro Osuka)实验室从事博士后研究工作,2009年4月回国,现任中国科学院理化技术研究所研究员,博士生导师。入选2009年度北京市科技新星(B类),首届中国科学院青年创新促进会会员(2011年),优秀会员(2015年),理化所优秀员工(2021年)。主要从事高档光刻胶的研发与产业化工作,主持或参与02重大专项、国家自然科学基金重大/面上项目、中科院科技专项等项目,在J. Am. Chem. Soc.、ACSAppl. Mater. InterfacesJ. Mater. Chem. C 等学术刊物上发表学术论文100余篇,申请光刻胶发明专利54项(授权23项)。


    社会任职:
    研究方向:
  • 新型超高分辨光刻胶材料体系、光刻机理和工艺研究;

    特种光刻胶材料体系的开发与应用研究;

    有机功能化合物合成及光物理性质研究。


    承担科研项目情况:
  • 作为项目(子课题)负责人先后承担(参与)国家科技重大专项(02专项)、财政部重大科研装备研制项目、中科院先导项目、自然基金重大项目(课题)等。


    代表论著:
  • 1. Rongrong Peng, Peng Lian, Jinping Chen*, Tianjun Yu, Yi Zeng, Shuangqing Wang, Xudong Guo, Rui Hu, Jun Zhao, Yanqing Wu,Guoqiang Yang* and Yi Li*, ‘Lithographic performances of aryl sulfonate ester modified polystyrene as nonchemically amplified resists Ind. Chem. Mater., 2025, 3, DOI: 10.1039/d5im00046g

    2. Rongrong Peng, Jinping Chen*, Tianjun Yu, Yi Zeng, Shuangqing Wang, Xudong Guo, Rui Hu, Peng Tian, Michaela Vockenhuber, Dimitrios Kazazis, Jun Zhao, Yanqing Wu, Yasin Ekinci,* Guoqiang Yang*, Yi Li*, ‘Nonchemically-amplified molecular resists based on calixarene derivatives enabling 14 nm half-pitch nanolithography’ Chin. J. Chem.2025, 43(13), 1513-1522 (Front Cover).

    3. Zhuoran Liu, Jinping Chen*, Tianjun Yu, Yi Zeng, Xudong Guo, Shuangqing Wang, Rui Hu, Michaela Vockenhuber, Peng Tian, Dimitrios Kazazis, Yasin Ekinci,* Guoqiang Yang*, Yi Li*, ‘Performance Optimization of Sulfonium-Functionalized Molecular Resists for EUV and Electron Beam LithographyACS Appl. Electron Mater., 2025, 7 (6), 2640-2649. 

    4. Xiaodong Yuan, Jinping Chen*, Tianjun Yu, Yi Zeng, Xudong Guo, Shuangqing Wang, Rui Hu, Peng Tian, Michaela Vockenhuber, Dimitrios Kazazis, Yasin Ekinci,* Jun Zhao, Yanqing Wu, Guoqiang Yang*, Yi Li*, ‘Nonchemically Amplified Molecular Resist based on Multi-sulfonium Modified Triptycene for Electron beam and Extreme Ultraviolet Lithography’ J. Micro/Nanopattern. Mater. Metrol.2024, 23(3), 034601.

    5. Huiwen An, Jinping Chen*, Yi Zeng, Tianjun Yu, Shuangqing Wang, Xudong Guo, Rui Hu, Peng Tian, Michaela Vockenhuber, Dimitrios Kazazis, Yasin Ekinci*, Guoqiang Yang*, Yi Li*, ‘Increasing the Sensitivity of Nonchemically-Amplified Resists by Oxime Sulfonate Functionalized Polystyrene’ ACS Appl. Polym. Mater., 2024, 6(9), 5374–5384.

    6. Yake Wang, Jinping Chen*, Yi Zeng, Tianjun Yu, Shuangqing Wang, Xudong Guo, Rui Hu, Peng Tian, Michaela Vockenhuber, Dimitrios Kazazis, Yasin Ekinci,* Yanqing Wu, Shumin Yang, Jun Zhao, Guoqiang Yang,* and Yi Li*, Nonchemically Amplified Molecular Resists Based on Sulfonium-Functionalized Sulfone Derivatives for Sub-13 nm Nanolithography’ ACS Appl. Nano Mater., 2023, 6 (19), 18480-18490.

    7. Zhihao Wang, Jinping Chen*, Tianjun Yu, Yi Zeng, Xudong Guo, Shuangqing Wang, Timothée Allenet, Michaela Vockenhuber, Yasin Ekinci*, Guoqiang Yang*,  Yi Li*, ‘Sulfonium-Functionalized Polystyrene Based Non-chemically Amplified Resists Enabling sub-13 nm NanolithographyACS Appl. Mater. Interfaces, 2023, 15 (1), 2289-2300.

    8. Shengwen Hu, Jinping Chen*, Tianjun Yu, Yi Zeng, Xudong Guo, Shuangqing Wang, Guoqiang Yang*, Yi Li*, Photoresists Based on Bisphenol A Derivatives with tert-Butyl Ester Groups for Electron Beam Lithography J. Photochem. Photobiol. A Chem. 2023, 436, 114351.

    9. Shengwen Hu, Jinping Chen*, Tianjun Yu, Yi Zeng, Shuangqing Wang, Xudong Guo, Guoqiang Yang*, Yi Li*, A Novel Dual-tone Molecular Glass Resist Based on Adamantane Derivatives for Electron Beam Lithography. J. Mater. Chem. C 2022,10, 9858-9866.

    10. Zhihao Wang, Jinping Chen*, Tianjun Yu, Yi Zeng, Guoqiang Yang*, Timothee Allenet, Vockenhuber Michaela, Ekinci Yasin, Yi Li*, Water Developable Non-chemically Amplified Photoresist for Electron Beam and Extreme Ultraviolet Lithography. J. Micro/Nanopattern. Mater. Metrol.2022, 21(4), 


    获奖及荣誉:
  • 1)北京市科技新星(2009) 

    2)中国科学院青年创新促进会会员(2011) 

    3)中国科学院光化学转换与功能材料重点实验室学术报告特等奖(2013) 

    4)理化青年论坛青年学术报告优秀奖(2014) 

    5)  中国科学院青年创新促进会优秀会员(2015)

    6)中国科学院理化技术研究所优秀员工(2021)